Micro Fluidic Mass Flow Meter for liquids

  • Fast and accurate measuring signal
  • Insensitive to mounting position
  • Very small internal volume (0,88 mm3, smaller on request)
  • Analog or digital (RS232/RS485) output
  • High pressure rating 1000 bar (15000 psi), higher on request

Liquid Mass Flow Meters for Ultra Low Flow Rates

Bronkhorst® model LM02 Liquid Flow Meters (LFMs) are suited for precise measurement of flow ranges from 1,5...75 mg/h (0,025...1,25 μl/min) up to 12...600 mg/h, based on water. The microfluidic instruments can be applied for high pressure applications up to 1000 bar (higher on request). The LFM consists of a straight duplex steel sensor tube (W1.4462) with an internal volume of less than 1 mm3 which operates on the thermal measuring principle.

Due to its high pressure rating (up to 1000 bar; higher on request) the LIQUI-FLOW™ mini flowmeter is suited to HPLC systems. The instrument is equipped with a microprocessor-based printed circuit board, offering high accuracy and excellent temperature stability. The RJ45 connection is used for power supply and for both analog and digital (RS232/RS485) communication.

Technical specifications

Measurement system

Accuracy (incl. linearity)
(based on actual calibration)

±2% FS


1:50 (2...100%)


< 0,2% FS (typical H2O)

Response time (t63%)

0,4 sec.


0,1...100 cP

Operating temperature


Temperature sensitivity

0,1% RD/°C + 0,15 mg/h/°C

Attitude sensitivity (at 90°)

< ± 3 mg/h

Warm-up time (approx.)

2 min for accuracy ± 2% FS


Mechanical parts

Material (wetted parts)

Duplex steel W1.4462

Pressure rating

1000 bar abs

Process connections

none (10-32 UNF Female);
option: 1/16” OD (PEEK or SS316)



Ingress protection (housing)



Electrical properties

Power supply

+15…24 Vdc +/-10%

Max. power consumption

1 W


Analog output

0...5 (10) Vdc or 0 (4)...20 mA (sourcing output)

Digital communication

RS232 or RS485 (Modbus RTU/ASCII or FLOW-BUS)

Electrical connection

RJ45 modular jack

Technical specifications and dimensions subject to change without notice.