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Models 5866RT

The Brooks model 5866RT metal or elastomer sealed pressure controller and flow meter controls pressure while also measuring flow rate. Model 5866RT receives a remote pressure transducer signal, and using adjustable integral PID control electronics and control valve, will maintain a desired set pressure. With options in seals, electro-polished wetted surfaces and a wide pressure and flow measurement range, 5866RT delivers proven results across a broad range of processes.

Features

  • Integral pressure transducer
  • Response time: <0.8 seconds
  • Wide flow measurement range with full-scale flow rates from 0 - 3 sccm to 0 – 30,000 sccm
  • Wide range of full scale pressures (Max pressure 1500 psig)
  • Optional metal seal available
  • Electro-polished wetted surfaces (optional)
  • Electrically activated valve override
  • Suitable for upstream or downstream control
  • Analog interface

Benefits

  • Eliminates droop, hysteresis and boost
  • High leak integrity
  • More control over pressure and flow
  • Dynamic tuning adjustments with top mounted DIP switches

Applications

  • Thin-film processes
  • Chemical research
  • Petrochemical research
  • Laboratory
  • Fuel cell
  • Life science